Vectorized tracking for TransverseDeflectingCavity

[Hespe]

The TransverseDeflectingCavity fails to track with vectorized phase or frequency. The following example code will crash in the final line.

incoming = cheetah.ParticleBeam.from_parameters(
    num_particles=100_000, energy=torch.tensor([154e6, 14e9])
)
element = cheetah.TransverseDeflectingCavity(
    length=torch.tensor(1.0),
    phase=torch.tensor([[0.6], [0.5], [0.4]]),
)
outgoing = element.track(incoming)

[Hespe]

Relevant for #165